德國倍福BECKHOFF控製器CX5130-0111

HBr Hydrogen Bromide 9602-7000 0 ... 30.0 ppm
HCl Hydrogen Chloride 9602-5800 0 ... 30.0 ppm
HCN Hydrogen Cyanide 9602-5700 0 ... 30.0 ppm
HF Hydrogen Fluoride 9602-6500 0 ... 10.0 ppm
HMDS Hexamethyldisilazane 9602-6715 0 ... 0.500 % vol.
HMDS Hexamethyldisilazane 9602-6714 0 ... 500 ppm
N2
H4 Hydrazine 9602-7600 0 ... 1.00 ppm
NH3 Ammonia 100ppm 9602-6704 0 ... 100 ppm Standard
NH3 Ammonia 1000ppm 9602-6705 0 ... 1000 ppm Standard, for higher range
NO Nitric Oxide 9602-7200 0 ... 250 ppm
NO2 Nitrogen Dioxide 9602-7300 0 ... 25.0 ppm
O2 Oxygen 9602-5500 0 ... 25.0 % vol.
O3 Ozone 9602-7100 0 ... 1.00 ppm
O3 Ozone 9602-7101 0 ... 1.00 ppm Exhaust monitoring
PH3 Phosphine (2 El.) 9602-6100 0 ... 1.00 ppm special application
PH3 Phosphine (3 El.) 9602-6101 0 ... 1.00 ppm
SiH4 Silane 9602-6300 0 ... 50.0 ppm
SO2 Sulphur Dioxide 9602-5900 0 ... 25.0 ppm
TEOS Tetraethyl Silicate 9602-7500 0 ... 100 ppm
TMB Trimethyl Borate 9602-7510 0 ... 200 ppm
TMP Trimethyl Phosphite 9602-7800 0 ... 30.0 ppm
CH4 Methane 9602-9900 0 ... 100 LEL for Satellite C only /Standard
CH4 Methane 9602-9901 0 ... 100 LEL for Satellite C only
CH4 Methane 9602-9902 0 ... 100 LEL for Sat-Ex C Version
CH4 Methane 9602-9903 0 ... 100 LEL for Sat-Ex C Version
CH4 Methane 9602-9905 0 ... 100 LEL for Sat-Ex C Version
C4
F6 Hexafluoro-1,3-butadiene 9602-9732 0.....50.0 ppm
C5
F8 Octafluorocyclopentene 9602-9730 0 ... 20.0 ppm
CH3
F Methyl Fluoride 9602-9720 0 ... 0.500 % vol.
DCE 1,2 Di-chloro-ethylene 1,2 9602-9600 0 ... 1000 ppm
NF3 Nitrogen Trifluoride 9602-9700 0 ... 50.0 ppm
SF6 Sulphur Hexafluoride 9602-9710 0 ... 0.500 % vol